Optical fiber array substrate and method for producing the same

ABSTRACT

An optical fiber array substrate  11  has, in one surface thereof, eight V-grooves  12  for securing eight optical fibers  14  aligned in parallel to each other, and V-shaped side grooves  13  formed outside of the respective outermost V-grooves  12  located at the opposite sides of the substrate  11.  The apexes of the outside ridges  12   c  and  12   d  defining the outermost V-grooves  12  are at the same height as the apexes of the inside ridges  12   a  and, the height of the bottom  13   a  of the side groove  13  is lower than that of a contact point  12   e  between the ridge line of the V-groove  12  and optical fiber  14.

BACKGROUND OF THE INVENTION

The present invention relates to an optical fiber array substrate usedin an optical device connecting a plurality of optical fibers and hassecuring grooves for receiving and positioning a plurality of opticalfibers, and also to a method for producing the same.

In late years, there has been an increased demand for high-capacity andhigh-speed optical communication networks and optical devices of theoptical fiber array type have been brought to attention. Typically, insuch devices, a plurality of optical fibers are aligned by using asubstrate having linear V-grooves, and such substrate is fabricated by afabrication method such as press working, shaving or grinding of a platematerial, or directional etching of a silicon single-crystal platematerial.

However, in order to satisfy a severe dimensional accuracy required foroptical fiber array substrates by means of the fabrication method asmentioned in the above, it is required to grind V-grooves precisely withhigh angular accuracy one by one, to finish the V-grooves with desiredheight and desired interval therebetween. Therefore, there are problemsthat the methods require many steps and are complicated, hencenon-defective fraction is not increased so that costs are expensive.

In an optical fiber array substrate manufactured according to the methodas described above, since the surfaces of linear V-grooves are rough andthe shape of the regions between the V-grooves are too sharp, opticalfibers may be damaged when mounting and also the optical fiber arraysubstrate itself may be apt to be damaged or chipped. Therefore, itbecomes concerned that the substrate may be decreased in breakageresistance to be broken. Moreover, the V-grooves, which are finishedafter a lot of work, may be damaged during working process or followingcleaning process. Further, the bottom or top of the V-grooves may becracked during grinding process and the like, and thereby breakageresistance of the substrate may be lowered. Thus, the optical fiberarray substrate may often be broken during handling so that the yield islowered. Therefore the production efficiency of such optical fiber arraysubstrates is so low that they are not suitable for mass production.

Japanese Patent Laid-Open Publication No. Hei 2-139313 discloses afabrication method of an optical fiber array substrate in which a glassbase material is heated and softened to be drawn (i.e. to be drawn andformed) to a dimension of {fraction (1/10)}. However, since the basematerial actually is softened and deformed during the drawing process,it is difficult to keep the shape and to control the dimensionalaccuracy. As a result, the shape of the V-grooves becomes to bedeformed, particularly the shape of the outside V-grooves becomes to bedeformed significantly. In addition, the heights of the V-grooves becometo be not uniform due to variations thereof. Thus, such optical fiberarray substrates do not wear for applications requiring high accuracy.More specifically, in a substrate formed by the conventional drawingprocess, the surface of the base material where the V-grooves are formedis slightly elongated when heated and softened, so that the centralportion of the surface is deformed to cave in the order of severalmicrometers. As a result of this deformation, the V-grooves in thecentral portion become to be lower than the V-grooves in the peripheralportion by several micrometers. When optical fibers are arranged in suchV-grooves, the heights at the centers of the cores of the optical fibersbecome to vary by several micrometers, so that it is very difficult tofabricate a high precision substrate with V-grooves.

Further, in a conventional optical fiber array substrate 1 as shown inFIG. 9(A), outside ridges 2 d and 2 e defining outermost V-grooves 2 aan 2 b of optical fiber securing V-grooves 2 are greatly different inshape from inside ridges 2 c. Therefore, when optical fibers 4 areadhered to the optical fiber array substrate 1 by the use of athermosetting adhesive, or when they have been arranged as an opticalfiber array, a difference in heat history between the outside opticalfibers 4 a, 4 b and the inside optical fibers 4 c which are supported inthe V-grooves 2 is generated due to a difference in heat capacitybetween the outside ridges 2 d, 2 e and the inside ridges 2 c, whichwill be a factor to lower the reliability of the optical fiber array.

Furthermore, in the conventional optical fiber array substrate 1 asshown in FIG. 9(B), when the optical fibers 4 are held down by a plate 5and fixed with an adhesive 6, if the amount of the adhesive is toosmall, there is a problem that some of the optical fibers 4 will not befixed completely, because of the adhesive 6 not being distributedsufficiently to the fixing portions for all of the optical fibers. Onthe contrary, if the amount of the adhesive is too large, the adhesive 6will run off from the side of the substrate 1, as shown in FIG. 9(C), sothat troublesome tasks such as scraping the run-off adhesive 6 a orpolishing the sides of the substrate 1 will be required to comply withthe predetermined dimension. Therefore, there is a problem that theamount of adhesive is required to be controlled strictly.

SUMMARY OF THE INVENTION

The present invention has been accomplished in view of theaforementioned problems, and an object of the present invention is toprovide an optical giber array substrate having a high accuracy tocorrespond to high-speed and high-capacity optical communicationapplications and still causing no damage to the optical fiber arraysubstrate and optical fibers mounted thereon, and also to provide amethod for producing such an optical fiber array substrate affordinghigh production efficiency and suitable for mass production.

An optical fiber array substrate according to the present invention ismade of glass or crystallized glass in which crystals are precipitatedin amorphous glass and has a plurality of optical fiber securing groovesformed therein, and is characterized in that at least an apex-sideportion, extending from a contact point with an optical fiber, of anoutside ridge defining an outside optical fiber securing groove hassubstantially the same shape as an apex-side portion, extending from thecontact point with the optical fiber, of an inside ridge.

If the apex of the outside ridge defining the outside optical fibersecuring groove is located at a different height from that of the apexof the inside ridge, or if an outside lower portion of the outside ridgedefining the outside optical fiber securing groove is located not lowerthan the height of the contact point between the ridge line defining thegroove and the optical fiber, the shape of the outside ridge withrespect to the apex-side portion (upper portion) extending from thecontact point between the optical fiber and the groove is different fromthe shape of the inside ridge. Thereby, when optical fibers are adheredto the optical fiber array substrate by the use of a thermosettingadhesive, or when they have been arranged as an optical fiber array, adifference in heat history between the outside optical fibers and theinside optical fibers which are supported in the grooves is generateddue to a difference in heat capacity between the outside ridges and theinside ridges, which will be a factor to lower the reliability of theoptical fiber array. In the optical fiber array substrate according tothe present invention, the apex of the outside ridge defining theoutside optical fiber securing groove is located at substantially thesame height as that of the apex of the inside ridge, and the outsidelower portion of the outside ridge defining the outside optical fibersecuring groove is located lower than the height of the contact pointbetween the ridge line defining the groove and the optical fiber, sothat the optical fiber array thus produced will not exhibit largedifference in thermal history caused by difference in thermal capacityof the ridges, between the outside optical fibers and the inside opticalfibers secured in the grooves.

Further, in the optical fiber array substrate according to the presentinvention, since the outside ridge defining the outside optical fibersecuring groove may have substantially the same shape as the insideridges, the optical fiber array produced will hardly exhibit differencein thermal history caused by difference in heat capacity of the ridges,between the outside optical fibers and the inside optical fibers securedin the grooves.

In the above constitution, the cross sectional shape of each of the sidesurfaces of the substrate parallel to the grooves may be a convexlyrounded shape.

The convexly rounded shape defining the cross sectional shape of theside surface of the substrate may be any convex shape with curvature sofar as it is continuous and has no irregular depression or the like.Although the shape is not limited to any specific shape, partiallycylindrical surfaces for example are suitable for convenience ofdimensional control. As a result of each of the side surfaces of thesubstrate having a convexly rounded cross sectional shape in this way,the substrate has no angular corners with an angle of about 90 degreesand hence no portion where stress would be concentrated, whereby theresistance to breakage of the substrate is enhanced. In addition, evenif the substrate is hit or dropped during handling, the substrate isdifficult to be chipped or cracked. Furthermore, the generation ofdefectives due to chips or flaws of the corners can be decreaseddramatically so that the yield for assembling an optical device can beimproved.

In the constitution above, a hole substantially parallel to the groovesmay be provided in the interior of the substrate.

By inserting a guide pin into the hole of the substrate, or filling thehole with adhesive, solder or the like when assembling an opticaldevice, it is made possible to assemble the optical fiber arraysubstrate to another optical fiber array substrate or to a waveguideeasily and securely with a minimum gripping margin. Further, when theoptical fibers are adhesively set by thermosetting adhesive or the like,the temperature all over the optical fiber array substrate can be easilymade uniform. Therefore, it is possible to eliminate concentration ofstress generated during the setting of the adhesive to some of theoptical fibers and also possible to prevent deterioration of opticalproperties.

As the hole provided in the interior of the substrate, a hole having asubstantially elliptical cross section or having a substantiallycircular cross section may be employed for example. In case of employeda hole with a substantially circular cross section, a plurality of suchholes may be provided in the interior of the substrate. The hole passesthrough the interior of the substrate and one end or both ends thereofopen(s) at the end surface(s) of the substrate. Preferably, the hole hasa constant cross sectional area along the direction substantiallyparallel to the grooves of the substrate.

If the cross sectional shape of the hole is substantially elliptical,the temperature of the whole substrate can be made still more uniformwhen the optical fibers are adhesively set by thermosetting adhesive.Therefore it is possible to eliminate concentration of stress generatedduring the setting of the adhesive to some of the optical fibers andalso possible to prevent deterioration of optical properties.

Further, in case when a plurality of holes each having a substantiallycircular cross section are provided, guide pins each having a circularcross section and a predetermined diameter can be inserted into theholes respectively, during the assembling of a optical device, so thatthe optical fiber array substrate can be assembled easily, stably andaccurately with another optical fiber array substrate or a waveguide.

Preferably, a side groove with a predetermined volumetric capacity isprovided at the outside of the aforementioned outside ridge. The sidegroove serves as a reservoir for adhesive used for adhering the opticalfibers in the optical fiber securing grooves, and therefore even ifrather excessive amount of adhesive is used during the adhesion of theoptical fibers with adhesive, there is no worry that the adhesive willrun off from side surface of the optical fiber array substrate. Thusstrict control of the amount of adhesive is not required. As a result,the work to adhesively setting the optical fibers is simplified and theyield can be improved.

The apexes of the ridges defining the optical fiber securing grooves arepreferably flat surfaces. By forming the apexes of the ridges into flatsurfaces, it is possible to prevent the ridges from being chipped orotherwise damaged when optical fibers are mounted in the grooves or theend surface of the optical fiber array substrate is polished, and henceno minute chips will be created by chipping.

It is also preferable for mounting and securing the optical fibers inthe grooves stably that the distance from the apexes of the ridges to aline connecting the centers of the optical fibers mounted in the groovesis less than or equal to 52.5 μm. If the apexes of the ridges areseparated upwards from the line connecting the centers of the opticalfibers mounted in the grooves by a distance exceeding 52.5 μm, it willbecome impossible to fix the optical fibers with pressing them againstthe side faces of the grooves, depending upon the surface roughness orflatness of a flat plate that is used to hold down the optical fibers tobe mounted and fixed in the grooves to retain the height of the opticalfibers at a constant level, and it may result in variation in the heightof the optical fibers. On the other hand, if the apexes of the ridgesare separated downwards from the line connecting the centers of theoptical fibers mounted in the grooves by a distance exceeding 52.5 μm,there is a possibility that the optical fibers may not be received inthe grooves properly to come out therefrom when mounting and fixing theoptical fibers to the grooves.

It is important that the optical fiber array substrate according to thepresent invention is made of glass or crystallized glass in whichcrystals are precipitated in amorphous glass. The optical fiber arraysubstrate made of glass or crystallized glass in which crystals areprecipitated in amorphous glass exhibits polishing properties similar tooptical fibers. Therefore, after the optical fibers are fixed thereto,it is easy to polish the end surfaces of the optical fibers at highaccuracy. In addition, when the optical fiber array substrate is made ofglass that is transparent to ultraviolet light or the like, it ispossible to fix the optical fibers by applying a photo-curing resin onthe grooves, mounting optical fibers therein, and applying ultravioletlight or the like to the resin through the optical fiber arraysubstrate.

It is preferable that the optical fiber array substrate according to thepresent invention is produced by drawing a base material. For example, abase material having linear grooves formed therein by means of cuttingis thermally softened to be drawn and formed, whereby the linear groovesare thermally softened to diminish generation of flaws or chips in theoptical fiber array substrate and the optical fiber array substratebecomes difficult to break. Further, the optical fibers are also hardlydamaged when mounted on the optical fiber array substrate.

Since the base material, whose cross sectional dimension is several tenstimes greater than the optical fiber array substrate to be formed, isdrawn and formed, the dimensional accuracy required or the lineargrooves previously formed in the base material is moderated several tenstimes as compared with the optical fiber array substrate, and hence thebase material can be worked easily without using any special workingdevices or the like. For this reason, it is possible to reduceremarkably the labor and costs required for the working process.Further, the interval between the linear grooves can be varied freely bychanging the reduction rate during the drawing process.

Since the surface of the optical fiber array substrate produced bydrawing is a fire-polished smooth surface, the surfaces of the opticalfibers will be hardly damaged when they are mounted later. In addition,flaws on the substrate surface formed during cutting or the like willdisappear, and such a trouble that the optical fiber array substrateitself is broken will be almost eliminated.

In addition, since in the drawing process, the base material isthermally softened, drawn, and then quenched, a compression stress layerhaving a stress of about 10 MPa is formed in the surface of the opticalfiber array substrate thus formed. As a result, the strength of theoptical fiber array substrate is increased so that sufficient strengthcan be maintained even if the optical fibers are repeatedly moved in thegrooves.

The mechanical strength is thus enhanced by the compression stresslayer, whereby the optical fiber array substrate, even if having ratherflaws or the like, will not be broken or chipped when subjected to asevere thermal shock or to an external force during handling, andtherefore, the optical fiber array substrate can be handled easily.

Further, an optical fiber array substrate according to the presentinvention is made from glass or crystallized glass in which crystals areprecipitated in amorphous glass, having a plurality of optical fibersecuring grooves formed therein, and is characterized in that a crosssectional shape of each of side surfaces of the substrate parallel tothe grooves is a convexly rounded shape.

Also in this optical fiber array substrate according to the invention,the following constitutions may be employed for the reasons as mentionedin the above:

-   -   (1) a hole substantially parallel to the grooves is provided in        the interior of the substrate;    -   (2) a side groove with a predetermined volumetric capacity is        provided at the outside of the outside ridge defining the        outside optical fiber securing groove;    -   (3) the apexes of the ridges defining the grooves are flat        surfaces;    -   (4) the distance from the apexes of the ridges to a line        connecting the centers of the optical fibers mounted in the        grooves is less than or equal to 52.5 μm; or    -   (5) the optical fiber array substrate is produced by drawing a        base material make of glass or crystallized glass in which        crystals are precipitated in amorphous glass.

Further, the optical fiber array substrate according to the presentinvention is made of glass or crystallized glass in which crystals areprecipitated in amorphous glass, having a plurality of optical fibersecuring grooves formed therein, and is characterized in that a holesubstantially parallel to the grooves is provided in the interior of thesubstrate.

Also in this optical fiber array substrate according to the invention,the following constitutions may be employed for the reasons as mentionedin the above:

-   -   (1) a cross sectional shape of the hole is substantially        elliptical;    -   (2) a cross sectional shape of the hole is substantially        circular, and a plurality of such holes are provided;    -   (3) a side groove having a predetermined volumetric capacity is        provided at the outside of the outside ridge defining the        outside optical fiber securing groove;    -   (4) the apexes of the ridges defining the optical fiber securing        groove are flat surfaces;    -   (5) the distance from the apexes of the ridges to a line        connecting the centers of the optical fibers mounted in the        grooves is less than or equal to 52.5 μm; or    -   (6) the optical fiber array substrate is produced by drawing a        base material made of glass or crystallized glass in which        crystals are precipitated in amorphous glass.

A preferred configuration for the optical fiber array substrate producedby drawing the base material is such that in the direction perpendicularto one surface of the substrate where the grooves are provided (in theheight direction), the ratio of the dimension in the height direction ofthe aforementioned hole in the interior of the substrate to thedimension in the height direction of the substrate (dimension in theheight direction from the other surface where no grooves are provided tothe apexes of the ridges in the one surface where the grooves areprovided) is 10% or greater.

According to the above preferred configuration, by controlling a gaspressure in the hole appropriately during the drawing process, a concavedeformation of the one surface of the substrate, which is apt to begenerated during the drawing process, can be prevented. If theaforementioned ratio is less than 10%, the concave deformation of theone surface of the substrate during the drawing process may not beavoided sufficiently.

A further preferred configuration of the optical fiber array substrateproduced by drawing the base material is such that, in addition to theaforementioned ratio, in the direction parallel to the one surface ofthe substrate where the grooves are provided (in the width direction),the ratio of the dimension in the width direction of the hole in theinterior of the substrate to the dimension in the width direction of theregion formed with the grooves in the one surface of the substrate(dimension in the width direction from the outermost edge of the outsidegroove at one side to the outermost edge of the outside groove at theother side) is 20% or greater.

If the ratio is less than 20%, the concave deformation of the onesurface of the substrate may not be able to be corrected over asufficient range of the region formed with the grooves, and consequentlyvariation in the height of the grooves may not be able to be decreased.In the case of eight optical fibers at 0.250 mm pitch, for example, thedimension in the width direction of the region formed with the groove inthe one surface of the substrate is 0.250×8=2.0 mm. When a plurality ofholes is provided, the dimension in the width of the holes is a sum ofthe dimensions in the width of the respective holes.

An optical fiber array substrate according to the present invention canbe produced by a producing method as follows. Firstly, a base materialmade of glass or crystallized glass and having a plurality of lineargrooves formed in one surface thereof is prepared. At his time, at leastan apex-side portion, extending from a contact point with an opticalfiber, of an outside ridge defining the outside groove, which is formedin the one surface of the base material and is to be an optical fibersecuring groove after forming, is formed so as to have substantially thesame shape as an apex-side portion, extending from the contact pointwith the optical fiber, of an inside ridge. Next, the base material isgripped by a gripping part of feeding means and fed into a heatingfurnace so that the base material is heated to a predeterminedtemperature and drawn and formed while drawing a lower part of the basematerial by drawing means. A formed body obtained by drawing in this wayis then cut into a predetermined length to provide a longer body havinga substantially similar shape to that of the base material and having asize in a desired range. Thereafter, this longer body is cut into adesired length.

In the process of preparing the base material, since at least theapex-side portion, extending from the contact point with the opticalfiber, of the outside ridge defining the outside groove, which is formedin the one surface of the base material and is to be the optical fibersecuring groove after forming, is formed so as to have substantially thesame shape as the apex-side portion, extending from the contact pointwith the optical fiber, of the inside ridge, the outside optical fibersecuring groove can be formed as accurately as the inside grooves,without deformation. Preferably, the outside ridge defining the outsidegroove to be the outside optical fiber securing groove after forming isformed so as to have substantially the same shape as the inside ridge.

In the aforementioned constitution, a cross sectional shape of each ofside surfaces of the base material parallel to the grooves is preferableto be formed in a convexly rounded shape.

If the side surfaces of the base material are flat surfaces, the sidesurfaces of the base material are heated non-uniformly during thedrawing process so that the cross sectional shape of the formed body maybe apt to be deformed due to generation of large temperaturedistribution in the side surfaces. On the contrary, when the crosssectional shape of the side surfaces of the base material are convexlyrounded, the side surfaces of the base material are apt to be heateduniformly. Therefore, even if surface tension is applied on the sidesurfaces of the base material when softened, an accurate dimensionalstabilization of the formed body becomes to be possible and hence highlyaccurate optical fiber array substrates can be produced with highefficiency. Further, the control of the maximum dimension between theside surfaces of the formed body enables the dimensions of the formedbody to be controlled accurately, and hence highly accurate opticalfiber array substrates can be produced with high efficiency. Stillfurther, as mentioned in the above, it is also able to enhance thebreakage resistance of the base material, to prevent the base materialfrom being chipped or cracked, and to improve the yield of thesubstrates.

Further, in the constitution as described in the above, it is preferablethat a hole substantially parallel to the grooves is provided in theinterior of the base material.

It is made possible to produce an optical fiber array substrateefficiently, by previously forming a hole along the longitudinaldirection of the grooves in the interior of the base material to bedrawn and formed.

It is also preferable that an inner diameter of the hole in the basematerial is varied during the drawing process, or that a gas pressure inthe hole in the base material is controlled during the drawing process.

For example, a hole having a substantially constant cross sectional areaalong the longitudinal direction of the grooves is formed passingthrough the interior of the base material, and the hole is changed to anarbitrary size during the drawing process, whereby any concavity in theone surface of the substrate where the grooves are formed can becorrected. In particular, the diameter of the hole can be increased bypressurizing to make the gas pressure in the hole of the base materialhigher than the atmospheric pressure during the drawing process, so thatany concavity can be corrected around the region closest, in directdistance, to the hole on the one surface of the substrate. On the otherhand, by depressurizing in the hole, the diameter of the hole also canbe decreased. In this manner, the height of the optical fiber arraysubstrate can be varied freely, variation in the height of the groovescan be decreased, and thus it is possible to produce optical fiber arraysubstrates with high dimensional accuracy.

In addition, a width of the optical fiber securing groove can be variedarbitrarily by changing a reduction ratio of the cross section of thelonger body to the cross section of the base material during the drawingprocess. Therefore, since the interval between the grooves of theoptical fiber array substrate can be varied, the grooves with variousintervals required in accordance with optical fibers to be mounted canbe manufactured easily, quickly and inexpensively without the need ofnew equipment such as molds or the like. Further, the temperature of thebase material can be adjusted to control the viscosity thereof duringthe drawing process, so that the shape and intervals of the grooves canbe varied minutely.

Further, the optical fiber array substrate according to the presentinvention can be also produced by a producing method as follows. Thatis, a method or producing an optical fiber array substrate, comprisingthe steps of, preparing a base material made of glass or crystallizedglass, the base material having a plurality of linear grooves formed inone surface thereof, gripping the base material by a gripping part offeeding means and feeding it into a heating furnace so that the basematerial is heated to a predetermined temperature, drawing the basematerial while drawing a lower part of the base material by drawingmeans to obtain a formed body, cutting the formed body into apredetermined length to provide a longer body having a substantiallysimilar shape to the base material and having a size in a desired range,and cutting the longer body into a desired length, wherein in the stepof preparing the base material, a cross sectional shape of each of sidesurfaces of the base material parallel to the grooves is a convexlyrounded shape.

Also in this manufacturing method, the following constitutions can beemployed:

-   -   (1) a hole substantially parallel to the grooves is provided in        the interior of the substrate;    -   (2) an inner diameter of the hole in the base material is varied        during the drawing process, or a gas pressure in the hole in the        base material is controlled during the drawing process; or    -   (3) a width of the optical fiber securing groove is varied        arbitrarily by changing a reduction ratio of the cross section        of the longer body to the cross section of the base material        during the drawing process.

Still further, the optical fiber array substrate according to thepresent invention also can be produced by a producing method as follows.That is, a method for producing an optical fiber array substrate,comprising the steps of, preparing a base material made of glass orcrystallized glass, the base material having a plurality of lineargrooves formed in one surface thereof, gripping the base material by agripping part of feeding means and feeding it into a heating furnace sothat the base material is heated to a predetermined temperature, drawingthe base material while drawing a lower part of the base material bydrawing means to obtain a formed body, cutting the formed body into apredetermined length to provide a longer body having a substantiallysimilar shape to the base material and having a size in a desired range,and cutting the longer body into a desired length, wherein in the stepof preparing the base material, a hole substantially parallel to thegrooves is provided in the interior of the base material.

Also in this manufacturing method, the following constitutions can beemployed:

-   -   (1) an inner diameter of the hole in the base material is varied        during the drawing process, or a gas pressure in the hole in the        base material is controlled during the drawing process; or    -   (2) a width of the optical fiber securing groove is varied        arbitrarily by changing a reduction ratio of the cross section        of the longer body to the cross section of the base material        during the drawing process.

In the producing method according to the present invention, since thebase material with great dimension, whose cross section area is severaltens times greater than the optical fiber array substrate, is drawn andformed, the dimensional accuracy required for the linear groovespreviously formed in the base material is moderated several tens timesas compared with the optical fiber array substrate. Therefore, the basematerial can be worked easily without using any special working devicesor the like. For this reason, it is possible to reduce remarkably thelabor and costs required for the working process.

As described in the above, with the optical fiber array substrate andthe producing method thereof according to the present invention, it ispossible to provide an optical fiber array that has high accuracy andhigh strength corresponding to high-speed and high-capacity opticalcommunication applications and that is still inexpensive.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an optical fiber array substrate according to a firstembodiment, FIG. 1(A) being a perspective view, FIG. 1(b) being a sideview, and FIG. 1(C) being an enlarged photograph of V-grooves;

FIG. 2 shows an optical fiber array substrate according to a secondembodiment, FIG. 2(A) being a perspective view, FIG. 2(B) being a sideview, and FIG. 2(C) being an enlarged photograph of V-grooves;

FIG. 3 shows an optical fiber array substrate according to a thirdembodiment, FIG. 3(A) being a perspective view, FIG. 3(B) being a sideview, and FIG. 3(C) being a side view illustrating the state whereoptical fibers are adhered by an adhesive;

FIG. 4 includes enlarged side views of V-grooves, FIG. 4(A) illustratingan optical fiber array substrate with an interval P between theV-grooves being 127 μm, and FIG. 4(B) illustrating an optical fiberarray substrate with an interval P between the V-grooves being 250 μm;

FIG. 5 shows an optical fiber array substrate according to a fourthembodiment, FIG. 5(A) through FIG. 5(D) respectively showing differentexamples exemplifying different centers of curvatures of the sidesurfaces having a partially cylindrical shape, various sectional shapeof the hole(s), and various numbers of the hole(s);

FIG. 6 shows a base material to be drawn and formed and a glass plate asoriginal material of the base material, FIG. 6(A) illustrating a glassplate, FIG. 6(B) illustrating a base material prepared by working theglass plate of FIG. 6(A), FIG. 6(C) illustrating a glass plate, and FIG.6(D) illustrating a base material prepared by working the glass plate ofFIG. 6(C);

FIG. 7 schematically shows a process of drawing a base material, FIG.7(A) showing a process of drawing a base material having no hole, andFIG. 7(B) showing a process of drawing a base material having a hole(s);

FIG. 8 schematically shows various aspects of dimensional measurement ofdrawn and formed bodies that have been formed from a base material; and

FIG. 9 shows a conventional optical fiber array substrate.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of optical fiber array substrates according to the presentinvention will be described with reference to the drawings.

FIG. 1 shows an optical fiber array substrate 11 according to a firstembodiment. The optical fiber array substrate 11 is, for example, madeof transparent borosilicate glass and has, in one surface thereof, eightgrooves (e.g. V-grooves) 12 for securing eight optical fibers 14 alignedin parallel to each other, and V-shaped side grooves 13 formed outsideof the respective outermost V-grooves 12 located at the opposite sidesof the substrate 11. Further, in this embodiment, the side surfaces 11 aand 11 b of the substrate 11 that are parallel to the grooves 12 arerespectively convex partially cylindrical surfaces each having thecenter of curvature at the center of the substrate 11.

A flat surface 12 b is formed at each of the apexes of the ridgesdefining the V-grooves 12. The apexes of the outside ridges 12 c and 12d defining the outermost V-grooves 12 are at the same height as theapexes of the inside ridges 12 a and, as shown in the enlarged view ofFIG. 1(B), the height of the bottom 13 a of the side groove 13 is lowerthan that of a contact point 12 e between the ridge line of the V-groove12 and optical fiber 14. Further, in this embodiment, the height of thebottom 13 a of the side groove 13 is higher than that of the bottoms ofthe V-grooves 12. Due to the side grooves 13, apex-side portions of theoutside ridges 12 c and 12 d extending from the contact points 12 e withthe optical fiber 14 are formed into substantially the same shape asapex-side portions of the inside ridges 12 a extending from the contactpoints 12 e with the optical fiber 14.

FIG. 2 shows an optical fiber array substrate 11′ according to a secondembodiment. According to this embodiment, the side surfaces 11 a and 11b of the substrate 11′ parallel to the grooves 12 are respectively flatsurfaces. The other constitutions are the same as the embodiment shownin FIG. 1.

Dimensions of the optical fiber array substrate 11 shown in FIG. 1 weremeasured. The optical fiber array substrate 11 was fixed such that anend surface thereof could be watched straightly from a measuringmicroscope, and an image of the shape of the linear V-grooves 12 forsecuring optical fibers 14 therein was recognized on a screen thoroughthe measuring microscope having a CCD camera so that an angle of thevalley of each of the linear V-grooves 12, and intervals between theV-grooves 12 were measured. As a result, the angle of the valley of eachof the V-grooves 12 was 98 degrees, the interval between the V-grooves12 was 127 μm±0.5 μm, and the variation in height of the V-grooves 12was within the range of ±0.5 μm. The angle of the valley of each of theside grooves 13 was 98 degrees.

Further, when the cross section of the optical fiber array substrate 11was observed while being enlarged by about 250 times, as shown in FIG.1(C), the length of the flat surface 12 b formed at the apex of theridge 12 a of the V-groove 12 was about 10 μm.

Still further, in the optical fiber array substrate 11 as shown in FIG.4(A), the interval P between the V-grooves 12 was 127 μm±0.5 μm, and adistance L from the line connecting the centers 14 a of the opticalfibers 14 secured in the V-grooves 12 at the interval P to the flatsurface 12 b of the ridge 12 a was 20 μm within 52.5 μm.

FIG. 3 shows an optical fiber array substrate 15 according to a thirdembodiment. In this embodiment, V-shaped side grooves 17 are formedoutside of the respective outermost V-grooves 12 located at the oppositesides of the substrate 15, and the height of the bottom of each of theside grooves 17 is substantially the same as the height of the bottom ofthe V-groove 12. Due to the side grooves 17, the outside ridges 12 c and12 d are formed so as to have substantially the same dimension and shapeas those of the inside ridges 12 a. The other constitutions are the sameas the embodiment shown in FIG. 1.

Dimensions of the optical fiber array substrate 15 shown in FIG. 3 weremeasured in the same manner as mentioned in the above. As a result, theangle of the valley of each of the V-groove 12 was 96 degrees, theinterval between the V-grooves 12 was 250 μm±0.5 μm, and variation inheight of the V-grooves was within the range of ±0.5 μm. Further, asshown in FIG. 4(B), the interval P between the V-grooves 12 was 250μm±0.5 μm, and the distance L from the line connecting the centers 14 aof optical fibers 14 secured in the V-grooves 12 to the flat surface 12b of the ridges 12 a was 30 μm within 52.5 μm.

Further, as shown in FIG. 3(C), eight optical fibers 14 were adhered tothe optical fiber array substrate 15 by means of adhesive 16 and pressedby a glass plate 18 to secure the same. The optical fiber arraysubstrate 15 and the glass plate 18 were both 2.8 mm wide and 10 mmdeep. The amount of adhesive required to adhere all of the eight opticalfibers 14 was about 1.0×10⁻³ ml. When a little greater amount ofadhesive was used, however, the adhesion could be done neatly withoutrunning off of the adhesive from the side surfaces of the optical fiberarray substrate 15. If no side groove 17 is provided to serve as areservoir for retaining the adhesive 16, it will be necessary to controlthe adhesive amount to not less than about 1.0×10⁻³ ml but not more thanabout 1.4×10⁻³ ml. If the adhesive amount is less than 1.0×10⁻³ ml, theadhesive 16 may not be able to distribute to all of the eight opticalfibers, but if the adhesive amount exceeds 1.4×10⁻³ ml, the adhesive 16may run off from the side surfaces of the substrate 15. This means that,if no side groove 17 is provided to serve as a reservoir for retainingthe adhesive 16, the adhesive amount should be controlled within a rangeof about 0.4×10⁻³ ml. On the other hand, when the side grooves 17 areprovided to serve as reservoirs for retaining the adhesive 16, theadhesive amount can be controlled to not less than about 1.0×10⁻³ ml andnot more than about 1.7×10⁻³ ml. In other words, the control range ofthe adhesive amount can be enlarged to about 0.7×10⁻³ ml.

FIG. 5 shows optical fiber array substrates 20 according to a fourthembodiment. The optical fiber array substrate 20 is made, for example,of transparent borosilicate glass, and has in one surface thereof, eightgrooves 22 (e.g. V-grooves) for securing eight optical fibers aligned inparallel to each other, and V-shaped side grooves 23 formed outside therespective outermost V-grooves 22 located at the opposite sides of thesubstrate 20. For example, the intervals between the V-grooves 22 andthe intervals between the V-groove 22 and the side groove 23 are both250 μm. In this embodiment, the side surfaces 20 a and 20 b of thesubstrate 20 parallel to the v-grooves 22 are respectively convexpartially cylindrical surfaces. In addition, a hole(s) substantiallyparallel to the V-grooves 22 is provided in the interior of thesubstrate 20.

In the examples as shown in FIGS. 5(A) and 5(B), the respective centersof curvature M of the side surfaces 20 a and 20 b are located at thecenter of the substrate 20. In the example as shown in FIG. 5(C), therespective centers of curvature M of the side surfaces 20 a and 20 b areoffset from the center of the substrate 20 and located in the interiorof the substrate 20. Further, in the example as shown in FIG. 5(D), therespective centers of curvature M of the side surfaces 20 a and 20 b areoffset from the center of the substrate 20, and located in the exteriorof the substrate 20. It should be noted that, although not shown in thedrawings, each of the side surfaces 20 a and 20 b is not limited to aconvexly rounded surface having a single curvature but may be acomposite of convexly rounded surfaces having different curvatures.

For example, the shape of the hole(s) 21 substantially parallel to theV-grooves 22 may be substantially circular in cross section as shown inFIG. 5(A), or substantially elliptical in cross section as shown in FIG.5(B). Alternatively, the holes 21 may consist of three holes which aresubstantially circular in cross section and arranged close to each otherin the central portion below the region where the V-grooves 22 areformed as shown in FIG. 5(C), or the holes 21 may consist of three holeswhich are substantially circular in cross section and arranged such thatone is located at the central portion below the region where theV-grooves 22 are formed and the other two are located respectively atthe opposite end portions below the region. The hole 21 passes throughthe interior of the substrate 20 and opens at the opposite end surfacesof the substrate 20.

In the examples shown in FIGS. 5(A), 5(B), and 5(C), the concavity inone surface of the substrate 20 where the V-grooves 22 are provided issubstantially eliminated by increasing the gas pressure (pressurizing)in the interior of the hole(s) 21 during the drawing process so as tocorrect the one surface of the, substrate 20. Further, in the exampleshown in FIG. 5(D), the concavity in the one surface of the substrate 20where the V-grooves 22 are provided is substantially eliminated byincreasing the air pressure (pressurizing) in the interior of the hole21 at the central portion while decreasing the air pressure(depressurizing) in the interior of the two holes 21 at the oppositesides during the drawing process so as to correct the one surface of thesubstrate 20.

Dimensions of the optical fiber array substrate 20 as shown in FIG. 5were measured in the same manner as mentioned in the above. As a result,the intervals between the V-grooves 22 were 250 μm±0.5 μm for all theconfigurations in FIGS. 5(A) through 5(D). Variation in height of theV-grooves 22 was within the range of ±0.5 μm as for the configurationsin FIGS. 5(A) and 5(B), while being within the range of ±0.4 μm as forthe configurations in FIGS. 5(C) and 5(D).

Next, an embodiment of a method for producing an optical fiber arraysubstrate according to the present invention will be described withreference to the drawings.

Firstly, as shown in FIG. 6(A), a cylindrical material made ofborosilicate glass was worked into a glass plate 31 having a pair offlat surfaces 31 c and 31 d while leaving side surfaces 31 a and 31 b aspartially cylindrical surfaces. Thereafter, one surface 31 c of theglass plate 31 was worked to produce a base material 32 as shown in FIG.6(B). The one surface 32 c of the base material 32 has been worked tohave eight linear grooves 32 e, which will be optical fiber securingV-grooves after a forming, each having an angle of 90 degrees at thevalley thereof, and side grooves 32 f at the outside of the grooves 32e. The side surfaces 32 a and 32 b of the base material 32 are convexlypartially cylindrical surfaces.

As shown in FIG. 7(A), the base material 32 was then attached to adrawing device 40, and heated by an electric furnace 42. A draw formedportion 32 g coming out of the electric furnace 42 was drawn by driveroller(s) not shown, and controlled to a fixed outer diameter while thediameter across the side surfaces of the draw formed portion 32 g beingmeasured by laser light not shown to obtain a formed body having thesame cross sectional shape and cross sectional dimensions as those of anoptical fiber array substrate to be produced.

During this drawing process, as shown in FIGS. 8(A) and 8(B), the widthW between the side surfaces (the diameter of the partially cylindricalsurfaces) of the draw formed portion 32 g is measured by a signal 50 afrom a photo detector due to laser light L from a measuring device 50.When the cross sectional shape of the side surfaces of the draw formedportion 32 g are convexly rounded shape, particularly partiallycylindrical surfaces, the width (the diameter of the partiallycylindrical surfaces) W can be measured accurately even if the drawformed portion 32 g is rather oblique during the drawing process.Therefore, with controlling the dimension of the width (the diameter ofthe partially cylindrical surfaces) W with accuracy, the dimension ofthe draw formed portion 32 g and hence of the resulting optical fiberarray substrate can be controlled precisely.

On the contrary, as shown in FIG. 8(C), in case when the side surfacesof the draw formed portion 32 h are flat surfaces, since the width Wwill vary largely to (W+ΔW) even if the draw formed portion 32 h isslightly oblique during the drawing process, correct dimensionalinformation may not be obtained. Consequently, it may be difficult tocontrol the dimensions so that the yield may be lowered.

Then, the formed body formed by the drawing was cut by means of a cutter43 into a length of 250 mm to obtain a longer body 34. The longer body43 thus obtained was cut precisely into a predetermined length tothereby obtain the optical fiber array substrate 11 as shown in FIG. 1.

Further, the rotational speed of the drive roller(s), not shown, of thedrawing device 40 was varied to produce, from the same base material 32,an optical fiber array substrate in which the interval between V-grooveswas 250 μm. In the optical fiber array substrate thus produced, theangle of the valley each of the V-grooves was 96 degrees, the intervalbetween the V-grooves was 250 μm+0.5 μm, and the variation in height ofthe optical fibers 14 secured in the V-grooves was in the range of ±0.5μm.

Further, as a result of measuring the surface roughness of the opticalfiber array substrate thus produced, the Ra value of the surfaceroughness was 0.04 μm. This means that the surfaces of the optical fiberarray substrate were fire-polished by the beat softening thereof so thatthe surfaces become smooth.

In case when the optical fiber array substrate is reinforced by forminga compressive stress layer in the surface thereof by means of aquenching method, the formed body for the optical fiber array substratethat has come out of the furnace with predetermined cross sectionaldimensions and shape is quenched by spraying cold blast or a refrigerantthereto so that a compressive stress layer is generated in the glasssurface.

Further, in case where the surface of the optical fiber array substrateis reinforced by ion exchange, a longer body of about 250 mm for opticalfiber array substrate is immersed in molten salt of KNO₃ maintained atabout 400 deg C. in an ion exchange tank for about 10 hours. KNO₃ isthen washed off. Thereby, it is able to obtain such a longer body foroptical fiber array substrate that is increased in breakage resistanceas a mechanical strength measured by the three-point bending test, morethan double that of an untreated one. With the ion exchange treatment,the practical strength of the glass can be enhanced by replacing alkaliions (Na⁺) in the glass by alkali ions (K⁺) having a a greater ionicradius at a temperature lower than the annealing temperature to therebygenerate a layer wish compression stress of about 100 MPa in the glasssurface.

Further, according to another embodiment of the producing method, acylindrical material made of borosilicate glass was worked into a glassplate 31, as shown in FIG. 6(C), by forming two flat surface 31 c and 31d parallel to each other, while leaving side faces 31 a and 31 b aspartially cylindrial surfaces, and forming a hole 33 d having asubstantially circular cross section and passing through the interior ofthe glass plate 31. One surface 31 c of the glass plate 32 was thenworked to produce a base material 33 as shown in FIG. 6(D). The onesurface 33 c of the base material 33 has been worked to have eightlinear grooves 33 e, which will be optical fiber securing V-groovesafter a forming, each having an angle of 90 degrees at the valleythereof, and side grooves 33 f at the outside of the grooves 33 e. Theside surfaces 33 a and 33 b of the base material 33 are convexlypartially cylindrical surfaces. In addition, a hole 33 d is locatedbelow the central portion of the one surface 33 c of the base material33.

As shown in FIG. 7(B), the base material 33 was then attached to adrawing device 40, and heated by an electric furnace 42 while increasingthe gas pressure (i.e. pressurizing) in the interior of the hole 33 d bysupplying pressurized gas into the hole 33 d of the base material 33through a pipe 41. A draw formed portion 33 g coming out of the electricfurnace 42 was drawn by drive roller(s) not shown, and controlled to afixed outer diameter while the diameter across the side surfaces of thedraw formed portion 33 g being measured by laser light not shown, toobtain a formed body having the same cross sectional shape and crosssectional dimensions as those of an optical fiber array substrate to beproduced. Then, the formed body was cut by means of a cutter 43 into alength of 250 mm to obtain a longer body 35. The longer body 35 thusobtained was cut precisely into a predetermined length to thereby obtainan optical fiber array substrate 20 as shown in FIG. 5(A).

In the producing method as described above, the glass plate 31 (basematerial 33) was made of crystallized glass as shown in Table 1 below,and two types of optical fiber array substrates made of crystallizedglass, namely one with 127 μm intervals between V-grooves and the otherone with 250 μm intervals between V-grooves were prepared. Dimensionalmeasurement was performed on these two types of optical fiber arraysubstrates made of crystallized glass in the same manner as the above,resulting in that the interval P between the V-grooves was 127 μm±0.5 μmfor the former type whereas 250 μm±0.5 μm for the latter, and thevariation in height of optical fibers secured in the V-grooves waswithin the range of ±0.5 μm for both. Thus, the both optical fiber arraysubstrates exhibited high accuracies in dimensions and shape. Inaddition, the optical fiber array substrates made or crystallized glassexhibited improved breakage resistance compared with those made ofglass, while the polishing performance thereof was as good as that ofsilica optical fibers.

In the embodiments described above, by the formation of the side groovesat the outside of the optical fiber securing grooves, at least theapex-side portion, extending from the contact point with the opticalfiber, of the outside ridge defining the outside optical fiber securinggroove is made to have substantially the same shape as the apex-sideportion, extending from the contact point with the optical fiber, of theinside ridge, or alternatively the whole portion of the outside ridge ofthe groove is made to have substantially the same shape as the wholeportion of the inside ridge. However, the present invention is notlimited to such configuration, and it is also possible that the heightlevel of the outside lower edge of the outside ridge of the groove ismaintained equally up to the side surface of the substrate, so that theregion extending from the outside ridge to the side surface of thesubstrate becomes wholly evenly lower than the apex of the ridge.Further, according to the embodiments described above, the optical fiberarray substrate with V-groove valleys having an angle of 98 or 96degrees from the base material with V-groove valleys having an angle of90 degrees is produced. However, the angle of groove of the opticalfiber array substrate may be 90 or 100 degrees instead. Further, thecross sectional shape of the optical fiber securing grooves is notlimited to the V-shape, and it may be rectangular or other shape. TABLE1 Sample No. 1 2 3 4 5 glass SiO₂ 57.8 66.3 67.4 64.3 65.9 com- Al₂O₃24.6 18.2 16.6 18.0 18.2 po- Li₂O 2.7 2.3 2.3 2.5 2.0 sition K₂O 7.0 3.43.5 5.0 3.4 (mass TiO₂ 2.8 1.8 3.0 3.0 1.5 %) ZrO₂ 3.2 1.8 1.8 2.0 1.8ZnO 1.0 3.1 2.0 3.1 3.8 MgO — 1.0 1.0 1.0 1.5 CaO — — — 0.4 0.6 BaO — —— 0.5 1.4 B₂O₃ — — 2.0 — — Na₂O 0.4 — — — — P₂O₅ — — 0.4 — — AS₂O₃ 0.5 —— 0.2 0.1 Bi₂O₃ — 2.1 — — — crystallization 780 780 790 780 780condition (° C.) nucleus formation temperature crystal growth 1000 1000980 1050 1000 temperature main crystal β-quartz β- β- β- β- solidspodumen spodumen spodumen spodumen solution solid solid solid solidsolution solution solution solution

1. An optical fiber array substrate made of glass or crystallized glass in which crystals are precipitated in amorphous glass, the substrate having a plurality of optical fiber securing grooves formed therein, wherein at least an apex-side portion, extending from a contact point with an optical fiber, of an outside ridge defining an outside optical fiber securing groove has substantially the same shape as an apex-side portion, extending from the contact point with the optical fiber, of an inside ridge.
 2. The optical fiber array substrate according to claim 1, wherein the outside ridge defining the outside optical fiber securing groove has substantially the same shape as the inside ridges.
 3. The optical fiber array substrate according to claim 1, wherein a cross sectional shape of each of side surfaces of the substrate parallel to the grooves is a convexly rounded shape.
 4. The optical fiber array substrate according to claim 1, wherein a hole substantially parallel to the grooves is provided in the interior of the substrate.
 5. The optical fiber array substrate according to claim 1, wherein a side groove with a predetermined volumetric capacity is provided at the outside of the outside ridge defining the outside optical fiber securing groove.
 6. The optical fiber array substrate according to claim 1, wherein the apexes of the ridges defining the optical fiber securing grooves are flat surfaces.
 7. The optical fiber array substrate according to claim 1, wherein the distance from the apexes of the ridges to a line connecting the centers of the optical fibers mounted in the grooves is less than or equal to 52.5 μm.
 8. The optical fiber array substrate according to claim 1, wherein the substrate is produced by drawing a base material made of glass or crystallized glass in which crystals are precipitated in amorphous glass.
 9. An optical fiber array substrate made of glass or crystallized glass in which crystals are precipitated in amorphous glass, the substrate having a plurality of optical fiber securing grooves formed therein, wherein a cross sectional shape of each of side surfaces of the substrate parallel to the grooves is a convexly rounded shape.
 10. The optical fiber array substrate according to claim 9, wherein a hole substantially parallel to the grooves is provided in the interior of the substrate.
 11. The optical fiber array substrate according to claim 9, wherein a side groove with a predetermined volumetric capacity is provided at the outside of the outside ridge defining the outside optical fiber securing groove.
 12. The optical fiber array substrate according to claim 9, wherein the apexes of the ridges defining the optical fiber securing grooves are flat surfaces.
 13. The optical fiber array substrate according to claim 9, wherein the distance from the apexes of the ridges to a line connecting the centers of the optical fibers mounted in the grooves is less than or equal to 52.5 μm.
 14. The optical fiber array substrate according to claim 9, wherein the substrate is produced by drawing a base material made of glass or crystallized glass in which crystals are precipitated in amorphous glass.
 15. An optical fiber array substrate made of glass or crystallized glass in which crystals are precipitated in amorphous glass, the substrate having a plurality of optical fiber securing grooves formed therein, wherein a hole substantially parallel to the grooves is provided in the interior of the substrate.
 16. The optical fiber array substrate according to claim 15, wherein a cross sectional shape of the hole is substantially elliptical.
 17. The optical fiber array substrate according to claim 15, wherein a plurality of the holes is provided, and a cross sectional shape of each of the holes is substantially circular.
 18. The optical fiber array substrate according to claim 15, wherein a side groove with a predetermined volumetric capacity is provided at the outside of the outside ridge defining the outside optical fiber securing groove.
 19. The optical fiber array substrate according to claim 15, wherein the apexes of the ridges defining the optical fiber securing grooves are flat surfaces.
 20. The optical fiber array substrate according to claim 15, wherein the distance from the apexes of the ridges to a line connecting the centers of the optical fibers mounted in the grooves is less than or equal to 52.5 μm.
 21. The optical fiber array substrate according to claim 15, wherein the substrate is produced by drawing a base material made of glass or crystallized glass in which crystals are precipitated in amorphous glass.
 22. A method for producing an optical fiber array substrate, comprising the steps of: preparing a base material made of glass or crystallized glass, the base material having a plurality of linear grooves formed in one surface thereof; gripping the base material by a gripping part of feeding means and feeding it into a gripping the base material by a gripping part of feeding means and feeding it into a heating furnace so that the base material is heated to a predetermined temperature; drawing the base material while drawing a lower part of the base material by drawing means to obtain a formed body; cutting the formed body into a predetermined length to provide a longer body having a substantially similar shape to the base material and having a size in a desired range; and cutting the longer body into a desired length, wherein in the step of preparing the base material, forming at least an apex-side portion, extending from a contact point with an optical fiber, of an outside ridge defining the outside groove, which is formed in the one surface of the base material and is to be an optical fiber securing groove after forming, so as to have substantially the same shape as an apex-side portion, extending from the contact point with the optical fiber, of an inside ridge.
 23. The method for producing an optical fiber array substrate according to claim 22, wherein in the step of preparing the base material, the outside ridge defining the outside groove, which is formed in the one surface of the base material and is to be the optical fiber securing groove after forming, is formed such that the outside ridge is to have substantially the same shape as the inside ridge.
 24. The method for producing an optical fiber array substrate according to claim 22, wherein a cross sectional shape of each of side surfaces of the base material parallel to the grooves is a convexly rounded shape.
 25. The method for producing an optical fiber array substrate according to claim 22, wherein a hole substantially parallel to the grooves is provided in the interior of the base material.
 26. The method for producing an optical fiber array substrate according to claim 25, wherein an inner diameter of the hole in the base material is varied during the drawing step.
 27. The method for producing an optical fiber array substrate according to claim 26, wherein a gas pressure in the hole in the base material is controlled during the drawing step.
 28. The method for producing an optical fiber array substrate according to claim 22, wherein a width of the optical fiber securing groove is varied arbitrarily by changing a reduction ratio of the cross section of the longer body to the cross section of the base material during the drawing step.
 29. A method for producing an optical fiber array substrate, comprising the steps of; preparing a base material made of glass or crystallized glass, the base material having a plurality of linear grooves formed in one surface thereof; gripping the base material by a gripping part of feeding means and feeding it into a heating furnace so that the base material is heated to a predetermined temperature; drawing the base material while drawing a lower part of the base material by drawing means to obtain a formed body; cutting the formed body into a predetermined length to provide a longer body having a substantially similar shape to the base material and having a size in a desired range; and cutting the longer body into a desired length, wherein in the step of preparing the base material, a cross sectional shape of each of side surfaces of the base material parallel to the grooves is a convexly rounded shape.
 30. A method for producing an optical fiber array substrate, comprising the steps of: preparing a base material made of glass or crystallized glass, the base material having a plurality of linear grooves formed in one surface thereof; gripping the base material by a gripping part of feeding means and feeding it into a heating furnace so that the base material is heated to a predetermined temperature; drawing the base material while drawing a lower part of the base material by drawing means to obtain a formed body; cutting the formed body into a predetermined length to provide a longer body having a substantially similar shape to the base material and having a size in a desired range; and cutting the longer body into a desired length, wherein in the step of preparing the base material, a hole substantially parallel to the grooves is provided in the interior of the base material.
 31. The optical fiber array substrate according to claim 2, wherein a cross sectional shape of each of side surfaces of the substrate parallel to the grooves is a convexly rounded shape.
 32. The optical fiber array substrate according to claim 2, wherein a hole substantially parallel to the grooves is provided in the interior of the substrate.
 33. The optical fiber array substrate according to claim 2, wherein a side groove with a predetermined volumetric capacity is provided at the outside of the outside ridge defining the outside optical fiber securing groove.
 34. The optical fiber array substrate according to claim 2, wherein the apexes of the ridges defining the optical fiber securing grooves are flat surfaces.
 35. The optical fiber array substrate according to claim 2, wherein the distance from the apexes of the ridges to a line connecting the centers of the optical fibers mounted in the grooves is less than or equal to 52.51 μm.
 36. The optical fiber array substrate according to claim 2, wherein the substrate is produced by drawing a base material made of glass or crystallized glass in which crystals are precipitated in amorphous glass.
 37. The method for producing an optical fiber array substrate according to claim 23, wherein a cross sectional shape of each of side surfaces of the base material parallel to the grooves is a convexly rounded shape.
 38. The method for producing an optical fiber array substrate according to claim 23, wherein a hole substantially parallel to the grooves is provided in the interior of the base material.
 39. The method for producing an optical fiber array substrate according to claim 38, wherein an inner diameter of the hole in the base material is varied during the drawing step.
 40. The method for producing an optical fiber array substrate according to claim 39, wherein a gas pressure in the hole in the base material is controlled during the drawing step.
 41. The method for producing an optical fiber array substrate according to claim 23, wherein a width of the optical fiber securing groove is varied arbitrarily by changing a reduction ratio of the cross section of the longer body to the cross section of the base material during the drawing step. 